{"id":355856,"date":"2025-12-18T10:36:13","date_gmt":"2025-12-18T10:36:13","guid":{"rendered":"https:\/\/www.newsbeep.com\/us\/355856\/"},"modified":"2025-12-18T10:36:13","modified_gmt":"2025-12-18T10:36:13","slug":"3d-nanolithography-with-metalens-arrays-and-spatially-adaptive-illumination","status":"publish","type":"post","link":"https:\/\/www.newsbeep.com\/us\/355856\/","title":{"rendered":"3D nanolithography with metalens arrays and spatially adaptive illumination"},"content":{"rendered":"<p class=\"c-article-references__text\" id=\"ref-CR1\">Kawata, S., Sun, H. B., Tanaka, T. &amp; Takada, K. Finer features for functional microdevices. 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